We are developing precision microelectromechanical systems (MEMS) to improve measurement accuracy and throughput in scanning probe microscopy (SPM), particularly for scanning tunneling microscopy (STM) and atomic force microscopy (AFM). STM and AFM have been invaluable tools in the growth of nanotechnology but are limited in measurement speed and scanning area, which has hampered their use as a manufacturing tool and in process control applications in the nanomanufacturing and semiconductor industries. Our research focuses on the miniaturization of SPM sensing mechanisms (e.g., active cantilevers), high-speed MEMS scanning stages, advanced motion control, and instrument system integration. Research opportunities are available in the areas of design and analysis of MEMS sensors and actuators, micro- and nanofabrication, and control system design and analysis.