Nanomechanical resonators and resonator arrays with their extremely small mass and high surface/volume ratio present a unique opportunity for mass sensing. We design, fabricate, and characterize novel nano-electromechanical systems (NEMS) using a variety of thin-film materials (e.g., graphene, nanocrystalline diamond, single crystal diamond, silicon, and polysilicon films) for chemical and biological agent sensing and RF signal processing. Inventive schemes and processes have been used in order to produce novel nanoscience systems including the fabrication of a two-dimensional photonic crystal in diamond, the fabrication and characterization of single crystal diamond nanoresonators, and the measurement of Anderson’s localization in arrays of coupled resonators (photonic arrays). Since the role of the surface state in MEMS and NEMS systems is critical to understanding fundamental loss mechanisms, we have implemented surface science techniques such as scanning auger spectroscopy, secondary ion mass spectroscopy, x-ray photoelectron spectroscopy, infrared spectroscopy, and energy dispersive x-ray analysis to better understand the mechanisms involved. Surface functionalization of nanomechanical resonators with selective vapor adsorptive functional groups is necessary to implement nanomechanical systems for mass sensing. Functional groups that adsorb analytes of interest should be patterned only on the nanoresonator itself and should not be located on structural elements or microchannel walls, which would greatly restrict the minimum detectible limit of the overall devices. To address this, we are using a generic monolayer functionalization scheme based on an ultraviolet-mediated reaction between terminal alkenes and a hydrogen terminated surface.

Available facilities include a new state-of-the-art building dedicated to nanoscale science and technology research that is equipped with a wide range of processing and surface science analysis equipment.

 

key words

Diamond; Graphene; MEMS; Nanofabrication; Nanomechanics; NEMS; RF; Sensors; Silicon; Spectroscopy;

Citizenship:  Open to U.S. citizens and permanent residents

Level:  Open to Postdoctoral applicants