Structural Characterization of Electronic Materials
Naval Research Laboratory, DC, Electronics Science & Technology Division
Using transmission electron microscopy (TEM), our objective is to structurally characterize electronic materials and the associated extended defects such as dislocations and stacking faults. Structures of particular interest include 4H-SiC, GaN/Ga1-x-yAlxInyAlN, and Si/Si1-xGex thin films. Nanoelectric materials (e.g., consisting of gold nanoclusters formed by DNA-mediated self-assembly) are also being studied. We are also analyzing silicon oxide layers in silicon, or grown directly on Si substrate. In addition, our research group is in charge of a Hitachi H-9000UHR high-resolution TEM (a top entry instrument with 0.19 nm resolution). Other accessible TEM instruments include a Philips CM30 equipped with thin-window-, energy-dispersive x-ray spectroscopy (EDXS), and a JEOL 2010 with a field emission source; Z-contrast scanning transmission electron microscopy imaging; EDXS; and electron energy loss spectroscopy analytical capabilities.