name |
email |
phone |
|
Boris Feigelson |
boris.n.feygelson.civ@us.navy.mil |
202.767.0827 |
We are studying and developing ALD processes for depositing coatings on particles in order to produce novel core/shell particles for various applications [1,2]. Our interest in this ALD approach for making core/shell particles stems from its exceptional versatility potentially allowing the combination, within core/shell structures, of diverse materials including oxides, metals, nitrides, carbides, organic compounds, etc. In our particle ALD research we use customized rotary and fluidized bed ALD reactors. Development of new core/shell particles requires continuous modification and enhancement of the reactors for new processes as well as detailed in situ process characterization and ex situ materials characterization. A large part of our ALD work is related to development of new core/shell particles that are used as building blocks for new solids.
1. B. L. Greenberg, K. P. Anderson, M. A. Wolak, A. G. Jacobs, J. A. Wollmershauser, B. N. Feygelson. "Temperature Excursions Due to the Reaction Heat Produced by Atomic Layer Deposition on Nanostructured Substrates" Chemistry of Materials 32 (2020) : 10155- 10164
2. K. Manandhar, J. A. Wollmershauser and B. N. Feigelson. "Growth mode of alumina atomic layer deposition on nanopowders." Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 35(4) (2017): 041503
ALD, particle ALD, core/shell particles, fluidized bed ALD reactor, rotary ALD reactor
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