Semiconductor manufacturing is a complex procedure with challenging variations in machines and processes. For example, due to high-mix semiconductor manufacturing, in which hundreds of types of products are manufactured on one production line, the control-process-quality relationships are not fully understood based on quantitative data analysis. Understanding the control-process-quality relationships will enable consistent production by the prevention of faults based on measured process variations. Accordingly, semiconductor manufacturing systems are needed that rely on augmented intelligence, the augmentation of traditional scientific intelligence with artificial intelligence (AI) to provide humans with actionable intelligence. Augmented intelligent solutions use on-machine sensors for measurements before and during manufacturing processes, analyze the data with a fusion of metrological approaches and machine learning, and monitor and predict the performance of machines and their processes. Semiconductor manufacturers desire augmented intelligent solutions that monitor, diagnose, and predict process performances to optimize production quality and yield.

Proposals are welcome to develop augmented intelligent solutions for semiconductor manufacturing. For example, new methods may be developed for wafer inspection and control-process-quality relationships, among many other possible topics. Our facilities support experimental work via laboratory testbeds, numerous machining centers, and a nanoscale science center. Furthermore, NIST provides computational resources and has an interest group for AI that regularly meets, giving the successful applicant an opportunity to interact with a variety of NIST engineers and scientists.

key words

Semiconductor manufacturing; Advanced packaging; Smart manufacturing; Intelligent manufacturing; Advanced manufacturing; Subtractive manufacturing; Data-driven manufacturing; Manufacturing; Production; Industry 4.0; Advanced intelligence; Artificial intelligence; Data-driven science; Machine learning; Augmented intelligence; Machines; Machine tools; Production machines; Semiconductors; Measurement science; Metrology; Sensors; Technology transfer

Citizenship:  Open to U.S. citizens

Level:  Open to Postdoctoral applicants