Micro- and nanoelectromechanical (MEMS/NEMS) resonators are used in many critical applications including radio frequency (RF) filtering, timing, and physical sensing. This project investigates a broad range of topics related to the continued development of RF MEMS/NEMS resonators. Several resonator geometries are being developed that combine low-loss mechanical design, unique materials, and electrostatic, electrothermal, and piezoelectric actuation. These resonators are being applied to mass and force sensing, inertial sensing, biochemical sensing, and quantum-limited measurements. New tools are also being developed to better understand the physics of resonators, particularly optical instruments that can measure the motion of micro- and nanostructures with bandwidth exceeding 10 GHz and sub-picometer resolution. These tools are used to investigate device physics, such as transduction efficiency, nonlinear and coupled mode dynamics, and energy dissipation mechanisms.

 

key words

MEMS; NEMS; Microelectromechanical systems; Nanoelectromechanical systems; Resonator; Oscillator; Sensor; Quality factor; Mass sensing; Force sensing; Inertial sensing

Citizenship:  Open to U.S. citizens

Level:  Open to Postdoctoral applicants