The project aims to develop nanoscale optical imaging microscopy using DUV and EUV light sources for accurate characterization of nanoscale structures that contributes to reliable manufacturing of the next generation computing devices. Computational imaging methods such as coherent diffractive imaging, Fourier ptychography, structured illumination techniques, and other super resolution techniques are explored to achieve quantitative reconstruction of nanoscale structure images by developing novel DUV/EUV imaging optics and quantitative phase retrieval algorithms. A qualified candidate would already have some expertise in optical microscopy, computational imaging, instrumentation for optical microscopy, data acquisition and automated stage/camera control, DUV or EUV optics, optical inspection metrology for semiconductor devices.